Vertical Oven CVD (SiC)

Description
The CVD (silicon carbide) vertical tube furnace adopts methyl trichlorosilane (MTS) as an air source to make coating materials with oxidation resistant surfaces and to modify the characters of the matrix material. K

Technical characteristics
1. The most advanced control is used to control the flow and pressure of methyltrichlorosilane (MTS), making a stable air flow deposition and a small fluctuation pressure range. 
2. The vacuum chemical vapor deposition oven uses the special design deposition chamber, which ensures a good sealing effect and high anti-pollution protection performance. K
3. Multiple deposition windows ensure the homogeneity of the field flow, without depositions in the inactive corners and a good deposition surface. K
4. During the deposition process, the treatment of highly corrosive waste gas, flammable and explosive gas, solid powder and low melting point adhesive materials is performed. K
5. The new design of the anti-corrosion vacuum unit ensures long hours of continuous work and reduced maintenance time. 

Optional CVD Upright Oven Configuration
1. Oven door: lift / screw type / hydraulic / manual, Manual lock / automatic lock lock collar. 
2. Oven vessel: All carbon steel / Inner layer of stainless steel / Completely of stainless steel. 
3. Red Hot Zone: Light Carbon Felt / Light Graphite Felt / Composite Hard Felt / CFC K
4. Heating compound and muffle: Pressed isostatic graphite / High pressure purity, high density graphite and high strength / fine-grained graphite. 
5. Gas processing system: Volume / mass flow meter, manual / automatic valve, foreign brand / Chinese brand. 
6. Vacuum pump and caliber: foreign brand / china K
7. HMI: Simulation / touch screen / personal industrial computer K
8. PLC (Programmable Logic Control): OMRON / Siemens K
9. Temperature controller: SHIMADEN / EUROTHERM 
10. Thermocouple: Type C, S, K, N 
11. Recorder: Paperless / paperless recorder, foreign / Chinese mark K
12. Electrical Components: CHINT / Schneider / Siemens K

CVD Vertical Tube Furnace Specifications

Spec / Model	VCVD-0305-SIC	VCVD-0608- SIC	VCVD-0812- SIC	VCVD-1015- SIC	VCVD-1120- SIC	VCVD-1520- SIC
Working area dimensions (D × H) (mm)	Φ300 × 500	Φ600 × 800	Φ800 × 1200	Φ1000 × 1500	Φ1100 × 2000	Φ1500 × 2000
Maximum temperature (° C)	1500	1500	1500	1500	1500	1500
Uniform temperature (Cº)	± 5	± 5	± 7.5	± 7.5	± 10	± 10
Final vacuum (Pa)	fifty	fifty	fifty	fifty	fifty	fifty
Pressure increase range (Pa / h)	0.67	0.67	0.67	0.67	0.67	0.67
The above parameters can be adjusted according to the process requirements, and do not have to be accepted as standard. The details and specifications required will be recorded in the technical proposal and the contracts.