Vertical Oven CVD (C)

Description
The CVD (Carbon) vertical furnace is used for CVD composite materials that use hydrocarbon gas (as C3H8) as the carbon source. Works on CVD and CVI treatment for carbon materials.  K

Technical characteristics
1. Use different temperature control zones according to the size of the work area, ensuring a good temperature homogeneity.  
2. The most advanced control technology for the control of the flow and pressure of the methyl trichlorosilane (MTS) is adopted, making a stable deposition of the air flow and a small range of pressure fluctuation. 
3. The new design of the anti-corrosion vacuum unit ensures a continuous working period and a lower maintenance rate. 
4. The vertical carbon vacuum oven uses a special design deposition chamber, which ensures a good sealing effect and operation with maximum anti-pollution protection. K
5. Multiple deposition windows ensure uniform field flow, with no deposition in the inactive corners and a large deposition surface K
6. High corrosivity waste gas, flammable and explosive gas, solid powder and low melting point product are effectively treated in the deposition process. K

Optional CVD Vertical Oven Configuration
1. Oven Door: Screw / hydraulic / manual lift type, manual lock / automatic lock with locking collar. 
2. Oven vessel: All in carbon steel / inner layer of stainless steel / Completely of stainless steel 
3. Hot Zone: Soft Carbon Felt / Soft Graphite Felt / Composite Hard Felt / CFC K
4. Heating component and muffle: Pressed isostatic graphite / high press purity / high density / high strength graphite / fine-grained graphite K
5. Gas processing system: volume / mass flowmeter, manual / automatic valve, imported brand / Chinese brand K
6. Vacuum pump and gauge: imported brand / Chinese brand K
7. HMI: Simulation / Touch Screen / Personal Industrial Computer K
8. PLC (Programmable Logic Control): OMRON / Siemens K
9. Temperature controller: SHIMADEN / EUROTHERM 
10. Thermocouples: Type C, Type S, Type R, Type B
11. Recorder: Paperless / paper recorder, imported brand / Chinese brand K
12. Electrical Components: CHINT / Schneider / Siemens K

Specifications of Vertical Carbon Vacuum Oven

Spec / Model	VCVD-0305-C	VCVD-0608-C	VCVD-0812-C	VCVD-1015-C	VCVD-1120-C	VCVD-1520-C	VCVD-2632-C
Working area dimensions (D × H) (mm)	Φ300 × 500	Φ600 × 800	Φ800 × 1200	Φ1000 × 1500	Φ1100 × 2000	Φ1500 × 2000	Φ2600 × 3200
Maximum temperature (° C)	1500	1500	1500	1500	1500	1500	1500
Uniform temperature (Cº)	± 5	± 5	± 7.5	± 7.5	± 10	± 10	± 15
Final vacuum (Pa)	fifty	fifty	fifty	fifty	fifty	fifty	fifty
Pressure increase range (Pa / h)	0.67	0.67	0.67	0.67	0.67	0.67	0.67
The above parameters can be adjusted according to the process requirements, and do not have to be accepted as standard. The details and specifications required will be recorded in the technical proposal and the contracts.